ASML had 85.4 percent revenue share compared with Nikon's 10.3 percent and Canon's 4.3 percent, TIN said.
In terms of unit systems sales ASML's share of the market was lower at 60 percent but this is because ASML sells more expensive systems. ASML is the only company selling extreme ultraviolet (EUV) lithography systems which cost in over $100 million, TIN said.
Intel, Samsung Electronics, TSMC, and Globalfoundries are all planning on introducing EUV at the 7nm technology node to reduce multi-patterning process steps required of immersion deep UV lithography. The replacement of immersion deep UV by EUV will reduce deposition, etch, and metrology steps, impacting other equipment suppliers.
In 2012 TSMC, Samsung and Intel collectively invested billions of dollars in ASML to accelerate development of EUV lithography. TSMC sold its stake in 2015, Samsung halved its stake to in 2016 and Intel halved its stake to 7.5 percent in 2017.
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