IMEC claims the sensor shows precision of wide range of pressures while being compact, resistant to electromagnetic interference (EMI), and having multiplexing capabilities. Typical applications for this novel sensor could be medical and life sciences for tasks such as intracranial pressure or intravascular blood pressure monitoring.
The sensor has demonstrated a root mean square (rms) precision lower than 1Pa across a range of 100kPa. One key advantage of the technology is that it can be made without metal making it compatible with magnetic resonance imaging (MRI) scanning equipment.
"With our current demonstrator, and the high performance it achieves on a large pressure range, imec has demonstrated the superior performance of MOMS-based pressure sensors and their potential to complement – and in some applications even replace – current MEMS-based devices," said Xavier Rottenberg, principal member of the technical staff at IMEC, in a statement.
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