Inertial-grade MEMS capacitive accelerometers from ±2g to ±50g

November 10, 2017 // By Julien Happich
Silicon Designs' Model 1525 Series of commercial and inertial-grade MEMS capacitive accelerometers incorporates a proprietary MEMS variable capacitive sense element along with a ±4.0V differential analog output stage, internal temperature sensor and integral sense amplifier, all housed within a miniature, nitrogen damped, hermetically sealed, surface mounted J-lead LCC-20 ceramic package.

The 1525 Series features low-power (+5 VDC, 5 mA) operation, excellent in-run bias stability, and zero cross-coupling. Five unique full-scale ranges, of ±2 g, ±5 g, ±10 g, ±25 g, and ±50 g, are currently in production and available for immediate customer shipment. Each MEMS accelerometer offers reliable performance over a standard operating temperature range of -40° C to +85° C. Units are also relatively insensitive to wide temperature changes and gradients. Each device is marked with a serial number on its top and bottom surfaces for traceability. A calibration test sheet is supplied with each unit, showing measured bias, scale factor, linearity, operating current, and frequency response.

Silicon Designs -