Miniaturized pressure sensor dies come in AEC-Q101-qualified 1x1x0.4mm package

October 10, 2017 // By Julien Happich
In their automotive versions, TDK's C33 series of miniaturized EPCOS MEMS pressure sensor dies come in a 1x1x0.4mm footprint, making them one of the smallest of their kind.

They are designed for absolute pressures of 1.2 bar to 10 bar, and are qualified based on AEC-Q101. The typical operating voltage is 3V. With a supply voltage of 5 V they offer sensitivities of between 15 mV/bar and 80 mV/bar, depending on the type. The miniaturized pressure sensors are suitable for a temperature range from -40 to +135°C and can even withstand 140°C for short periods. They also offer a very long-term stability of ± 0.35% FS (full scale).

The C39 type, with its footprint of just 0.65x0.65mm is especially suitable for IoT and consumer applications. Its low insertion height of just 0.24mm makes the low-profile MEMS pressure sensor die suitable for applications in smartphones and wearables. The C39 is designed for an absolute pressure of 1.2 bar and, like the C33 series, offers long-term stability of ± 0.35% FS. All the pressure sensor dies operate on the piezoresistive principle and deliver, via a Wheatstone bridge, an analog signal that is proportional to the applied pressure and the supply voltage.

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