Liquid flow sensor focuses on low-volume dosing applications

Liquid flow sensor focuses on low-volume dosing applications

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Swiss sensor manufacturer Sensirion has launched a flow sensor for sensing flow rates of hydrocarbon-based liquids such as photoresists and solvents below 2 cc/second (120 ml/minute). Designed for use in high-purity fluid handling applications in the semiconductor, PV and flat panel display industries, the new SLQ-QT105 sensor features a short measurement response time of approximately 40 ms and high sensitivity for flow rates down to 0.05 cc/second (3 ml/minute). Detection of air bubbles in the microliter range is also possible.
By eeNews Europe


Flow is measured without moving parts and non-invasively through the wall of a straight flow path. All wetted materials are made from Teflon or quartz glass. The compact, lightweight device is equipped with fittings for 4- x 3-mm PFA tubing. A smart digital interface and robust RS485 communication is offered for long distance and bus capability.

Mechanical solutions, such as small paddlewheels and ultrasonic flow meters, are often unable to fulfill requirements due to their slow response, problems with bubbles, and inability to measure flow rates below 100 ml/minute repeatedly. With the SLQ-QT105, the advantages of CMOSens Technology are now available for the first time for use in high-end semiconductor applications.

More information about the SLQ-QT105 sensor at

Visit Sensirion at

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