ST extends MEMS pilot line project
Lab4MEMS 2 is an extension of an original project that was announced in April 2013. It has a budget of €26 million (about $30 million) that will be used to focus on developing micro-optical electromechanical systems (MOEMS) that merge micro-optics with MEMS.
The project has 20 partners led by ST as coordinating partner and will expand ST’s 200mm MEMS wafer manufacturing facility in Agrate Brianza while adding optical technologies. The project will also evaluate the possibility of a move to 300mm-diameter wafers.
Meanwhile the original project will maintain its emphasis on developing a pilot line for next-generation MEMS devices including the ability to integrate piezoelectric materials, magnetic materials and 3D packaging.
MOEMS is platform for optical switches, micro-mirror devices and dynamic displays, bi-stable devices, and optical shutters useful in micro-projectors, laser micro-scanners, human-machine interfaces, and micro-spectrometers. One goal of the project is to optimize the production of dual single-axis mirrors as well as to research the possibilities for the development of the dual-axis single mirror.
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“MOEMS is a promising multi-feature technology for miniaturization of critical optical systems that will benefit society, consortium members, and stakeholders, including ENIAC member states by creating valuable knowledge-based employment opportunities, increasing long-term prosperity, and enabling products that benefit society.” said Roberto Zafalon, European programs manager, R&D and public affairs for STMicroelectronics, in a statement.
The ENIAC joint undertaking is a public-private partnership involving some national governments from across Europe and the European Union. It is providing €1.8 billion (about $2 billion) of predominantly tax-payers’ money towards the costs of R&D projects. The Lab4MEMS II project, coordinated by ST, was selected for funding in Fall 2013 and work began in November 2014.
In addition to ST, partners in the Lab4MEMS II include the University of Malta; Okmetic Oyj; Murata Electronics; VTT Memsfab Ltd; Aalto University; Polewall AS; and Besi
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