Silex Microsystems: Piezoelectric MEMS: An Overview of Materials, Processes and Applications

By Silex Microsysystems
Download White Paper
Share:

A variety of piezoelectric materials can be used for an even broader variety of transducer and actuator applications. This white paper provides an overview of material systems but particularly PZT and AlN, manufacturing processes for bulk and thin films, component characteristics and applications. Read More



Disclaimer: by clicking on this button, you accept that your data might be communicated to this company. If you do not want us to communicate your data, please update your details on your profile

Download White Paper
White Papers
10s