X-Fab improves silicon microfluidic manufacturing

May 19, 2020 //By Peter Clarke
X-Fab improves silicon microfluidic manufacturing
Analog and mixed-signal foundry X-Fab Silicon Foundries SE (Erfurt, Germany) has said it has simplified the integration of microfluidic elements with CMOS and SOI dies.

The company has made microfluidic circuits for medical and industrial clients including applications such as lab-on-a-chip, DNA sequencing and synthesis and cancer diagnostics.

The company is extending its capability to include:

Noble metal electrode arrays 

Inorganic layers for surface passivation and protection

Deep silicon trenches and cavities

Bonded silicon or glass lid wafers

Polymeric fluidic structures

Customers will now be able to re-use existing process IP in these areas. X-Fab foresees applications in MEMS solutions for drug administering, flow metering and pollution monitoring.

"We are seeing a growing number of requests to implement silicon-based microfluidics. As a consequence, our engineering team is striving to bring two worlds together; so that medical OEMs' deep understanding of physiology and fluid analysis can be combined with X-Fab's knowledge of high-volume semiconductor manufacturing technologies," said Volker Herbig, vice president of MEMS business at X-Fab, in a statement.

Related links and articles:

www.xfab.com

News articles:

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Microfluidic MEMS aid rapid Covid-19 sequencing

Biological sensing transistor made available for Covid-19 testing

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X-Fab adds avalanche diodes to 180nm process


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